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| Cleanliness Class | Maximum Particles/m³ (by particle size) | |||||
|---|---|---|---|---|---|---|
| FS209E | ISO | ≥0.1μm | ≥0.2μm | ≥0.3μm | ≥0.5μm | ≥1μm |
| 100 | 5(A) | 100,000 | 23,700 | 10,200 | 3,520 | 832 |
| 1,000 | 6(B) | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 |
| 10,000 | 7(C) | 10,000,000 | 2,370,000 | 1,020,000 | 352,000 | 83,200 |
| 100,000 | 8(D) | 100,000,000 | 23,700,000 | 10,200,000 | 3,520,000 | 832,000 |